A 3D Printed Ti6Al4V Alloy Uniaxial Capacitive Accelerometer

A Highly Symmetrical Capacitive Triaxial Accelerometer

A Comparative Study of Aluminium Alloy and Titanium Alloy Comparison of AL-7175 alloy and Ti6Al4V alloy (Literature Survey Paper)

About 50% of metals used in Aerospace industries are Aluminium and Titanium alloys, Alloys such as Ti6Al4V, AL-7175, and AL7075 are used extensively in space vehicles, aviation, and automotive industries for having enhanced mechanical properties like High strength to weight ratio, low Thermal Expansion and better Corrosion resistance. Comparison of properties Aluminium and Titanium alloys shows...

A New Design and Optimization of Capacitive MEMS Accelerometer

In this paper, design and optimization of a folded beam for a shunt capacitive MEMS accelerometer is presented together with a comparison of important parameters to five beams with different geometries in range of 20g -100g for crash detection. The structure contains a proof mass which is suspended over fixed rigid pull-down electrode to provide capacitance measurement. Powerful soft wares (COV...

Polydimethylsiloxane as an elastic material applied in a capacitive accelerometer

Polydimethylsiloxane is a silicone rubber. It has a unique flexibility, resulting in one of the lowest glass-transition temperatures of any polymer. Furthermore, it shows a low elasticity change versus temperature, a high thermal stability, chemical inertness, dielectric stability, shear stability and high compressibility. Because of its high flexibility and the very low drift of its properties...

Characterisation of a Highly Symmetrical Miniature Capacitive Triaxial Accelerometer

polyimide (PI) as flexible interconnection layer between the W mass W house and movatile capacitor plate capacitor plates. The sensor structure and its basic operating A A principle, its mathematical mass-spring-damper model and the necessary cleanroom technology are described. The measurement results show a sensitivity of 0.15 V/(m/s2) with a corresponding resolution of 0.01 m/s2, an off-axis ...